No. 280 Round Diamond Brush Cloth
Keywords:
No. 280 Round Diamond Brush Cloth
Category:
Product Description
Product Overview
ScrubDISKS®, a specialized cleanroom‑grade product, is a patented scrubbing tool designed for preventive maintenance (PM) procedures on process equipment in industries such as semiconductor fabrication, flat‑panel displays, optical components, and hard disk drives. ScrubDISKS® is widely used in 200 mm and 300 mm wafer fabs for preventive maintenance or wet cleaning of CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metals and migratable ions, ScrubDISKS® offers a range of abrasive options—including diamond, silicon carbide, and aluminum oxide—enabling safe and efficient wet cleaning of BKMs. When paired with UltraSOLV® sponges, cleanroom wipes, and swabs, ScrubDISKS® helps reduce cleaning times, minimize equipment downtime, and lower contamination risks in critical process equipment. ScrubDISKS® is specifically engineered for use with the ErgoSCRUB® handle.
Key Features
• Available in a variety of roughness grades, it quickly removes process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear. ScrubDISKS® feature a fiber-free structure, significantly reducing the level of contaminants carried by the cleaning tool itself.
• A unique bonding technology reduces abrasive particle shedding, resulting in a cleaner preventive maintenance (PM) process.
• Using a cleaning‑type abrasive minimizes the residual presence of harmful ions. During preventive maintenance (PM), hydrogen peroxide (H₂O₂) can be eliminated, significantly reducing downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 280 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
| Place of origin | Thailand | ||
Related products
Get a product quote
One-stop service, integrated solutions!
