No. 140 Round Diamond Brush Cloth
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No. 140 Round Diamond Brush Cloth
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Product Description
Product Overview
ScrubDISKS® is a patented scrubbing tool designed for preventive maintenance (PM) programs in process equipment across industries such as semiconductor fabrication, flat-panel displays, optical components, and hard disk drives. Widely used in 200 mm and 300 mm wafer fabs, ScrubDISKS® is employed during PM or wet‑cleaning processes on CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metallic and mobile ions, and available with a range of diamond, silicon carbide, and aluminum oxide abrasives, ScrubDISKS® enables safe and efficient wet cleaning of BKMs. When used in conjunction with UltraSOLV® sponges, cleanroom wipes, and swabs, ScrubDISKS® helps shorten cleaning cycles, minimize equipment downtime, and reduce contamination levels in critical process equipment. ScrubDISKS® is specifically engineered to be used with the ErgoSCRUB® handle.
Key Features
• Offering a range of surface roughness options, it can swiftly remove process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear.
• ScrubDISKS®’s fiber-free structure significantly reduces the level of contaminants in cleaning tools.
• A unique adhesion technology minimizes the shedding of abrasive particles, resulting in cleaner preventive maintenance (PM) procedures. By employing wash‑off abrasives, harmful ionic residues are reduced to a minimum.
• The use of hydrogen peroxide (H₂O₂) can be eliminated in the PM process, thereby significantly reducing downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 140 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
| Place of origin | Thailand | ||
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