360-round diamond polishing cloth
Keywords:
360-round diamond polishing cloth
Category:
Product Description
Product Overview
ScrubDISKS®, a specialized cleanroom‑grade product, is a patented scrubbing tool designed for preventive maintenance (PM) of process equipment in industries such as semiconductor fabrication, flat‑panel displays, optical components, and hard‑disk manufacturing. ScrubDISKS® is widely used in 200mm and 300mm wafer fabs for the preventive maintenance or wet‑cleaning of CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metallic and migratable ions, ScrubDISKS® offers a range of abrasive options—including diamond, silicon carbide, and aluminum oxide—enabling safe and efficient wet cleaning of BKMs. When paired with UltraSOLV® sponges, cleanroom wipes, and swabs, ScrubDISKS® helps shorten cleaning cycles, minimize equipment downtime, and reduce contamination on critical process equipment. ScrubDISKS® is specifically engineered to be used with the ErgoSCRUB® handle.
Key Features
• Offering a variety of roughness options, it can rapidly remove process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear.
• ScrubDISKS® feature a fiber-free structure, significantly reducing the level of contaminants originating from the cleaning tool itself.
• A unique bonding technology reduces abrasive particle shedding, resulting in a cleaner preventive maintenance (PM) process.
• By using washable abrasives, harmful ion residues are minimized. The use of hydrogen peroxide (H₂O₂) can be eliminated during preventive maintenance (PM) procedures, thereby significantly reducing downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 360 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
| Place of origin | Thailand | ||
Related products
Get a product quote
One-stop service, integrated solutions!
