No. 800 Round Diamond Brush Cloth
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No. 800 Round Diamond Brush Cloth
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Product Description
Product Overview
ScrubDISKS®, a dust‑free‑room‑specific product, is a patented scrubbing tool designed for preventive maintenance (PM) procedures on process equipment in industries such as semiconductor fabrication, flat‑panel displays, optical components, and hard‑disk manufacturing. ScrubDISKS® is widely used in 200 mm and 300 mm wafer fabs to perform preventive maintenance or wet‑cleaning operations on CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metallic and migratable ions, and equipped with a variety of abrasives—including diamond, silicon carbide, and aluminum oxide—ScrubDISKS® enables safe, efficient wet cleaning of BKMs. When paired with UltraSOLV® sponges, cleanroom wipes, and swabs, ScrubDISKS® helps shorten cleaning cycles, minimize equipment downtime, and reduce contamination levels on critical process equipment. ScrubDISKS® is specifically engineered to be used with the ErgoSCRUB® handle.
Key Features
• Offering a range of roughness options, it quickly removes process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear. ScrubDISKS® feature a fiber-free structure, significantly reducing the level of contaminants introduced by the cleaning tool itself.
• A unique bonding technology reduces abrasive particle shedding, resulting in a cleaner preventive maintenance (PM) process.
• By using washable abrasives, harmful ion residues are minimized. Hydrogen peroxide (H₂O₂) can be eliminated from preventive maintenance (PM) procedures, significantly reducing equipment downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 800 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
| Place of origin | Thailand | ||
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