No. 180 round diamond polishing cloth
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No. 180 round diamond polishing cloth
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Product Description
Product Overview
ScrubDISKS®, a specialized cleanroom tool, is a patented scrubbing device designed for preventive maintenance (PM) tasks on process equipment in industries such as semiconductor fabrication, flat-panel displays, optical components, and hard disk drives. ScrubDISKS® is widely used in 200mm and 300mm wafer fabs for the preventive maintenance or wet‑cleaning of CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metallic and migratable ions, and offering a range of abrasive options—including diamond, silicon carbide, and aluminum oxide—ScrubDISKS® enables safe, efficient wet cleaning of BKM components. When paired with UltraSOLV® sponges, cleanroom wipes, and swabs, ScrubDISKS® helps reduce cleaning times, minimize equipment downtime, and lower contamination levels on critical process equipment. ScrubDISKS® is specifically engineered to be used with the ErgoSCRUB® handle.
Key Features
• Offering a range of roughness options, it quickly removes process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear. ScrubDISKS® feature a fiber-free structure that significantly reduces contamination from the cleaning tool itself.
• A unique bonding technology reduces abrasive particle shedding, resulting in a cleaner preventive maintenance (PM) process.
• Use wash‑off abrasives to minimize residual harmful ions. During preventive maintenance (PM), hydrogen peroxide (H₂O₂) can be eliminated, significantly reducing downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 180 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
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