No. 2000 round diamond polishing cloth
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No. 2000 round diamond polishing cloth
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Product Description
Product Overview
ScrubDISKS®, a proprietary scrubbing tool designed specifically for cleanrooms, is used in preventive maintenance (PM) operations on process equipment across industries such as semiconductor fabrication, flat-panel displays, optical components, and hard disk drives. ScrubDISKS® is widely employed in 200mm and 300mm wafer fabs for the preventive maintenance or wet‑cleaning of CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metals and migratable ions, ScrubDISKS® offers a range of abrasive options—including diamond, silicon carbide, and alumina—enabling safe and efficient wet cleaning of BKMs. When paired with UltraSOLV® sponges, lint‑free cloths, and swabs, ScrubDISKS® helps reduce cleaning times, minimize equipment downtime, and lower contamination risks in critical process equipment. ScrubDISKS® is engineered to be used with the ErgoSCRUB® handle.
Key Features
• Offers a variety of roughness options, enabling rapid removal of process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear.
• ScrubDISKS® feature a fiber-free structure, significantly reducing the level of contaminants originating from the cleaning tool itself.
• A unique bonding technology reduces abrasive particle shedding, resulting in a cleaner PM process. By using wash‑off abrasives, harmful ion residues are minimized. Hydrogen peroxide (H₂O₂) can be eliminated from the PM process, significantly reducing downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 2000 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
| Place of origin | Thailand | ||
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