No. 1350 Round Diamond Brush Cloth
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No. 1350 Round Diamond Brush Cloth
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Product Description
Product Overview
ScrubDISKS®, a proprietary scrubbing tool designed specifically for cleanrooms, is used in preventive maintenance (PM) procedures for process equipment across industries such as semiconductor fabrication, flat-panel displays, optical components, and hard disk drives. ScrubDISKS® is widely employed in 200mm and 300mm wafer fabs for the preventive maintenance or wet‑cleaning of CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metallic and mobile ions, ScrubDISKS® offers a range of abrasive options—including diamond, silicon carbide, and aluminum oxide—enabling safe and efficient wet cleaning of BKMs. When used in conjunction with UltraSOLV® sponges, lint‑free cloths, and swabs, ScrubDISKS® helps reduce cleaning times, minimize equipment downtime, and lower contamination risks in critical process equipment. ScrubDISKS® is engineered to be used with the ErgoSCRUB® handle.
Key Features
• Offering a range of roughness options, it quickly removes process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear. ScrubDISKS® feature a fiber-free structure that significantly reduces the contamination levels of the cleaning tool itself.
• A proprietary bonding technology minimizes abrasive particle shedding, resulting in a cleaner PM process. By using washable abrasives, harmful ion residues are reduced to an absolute minimum.
• Hydrogen peroxide (H₂O₂) can no longer be used in the PM process, thereby significantly reducing downtime.
Product Specifications
| Brand | Foamtec | ||
| Name | 1350 Diamond Grit ScrubDISK® | ||
| Model number | HT4528DC3-10 | HT4528DC3G-10 | HT4528DC5Z-1 |
| Size | 3.5" | 3.5" | 5" |
| Specifications | Velcro | Adhesive-backed | Velcro |
| Color | Yellow | ||
| Packaging | 10 pcs/bag | 10 pcs/bag | 1 pc/bag, 20 bags/carton |
| Validity period | 3 years | ||
| Place of origin | Thailand | ||
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