No. 140 square diamond brush cloth
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No. 140 square diamond brush cloth
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Product Description
Product Overview
ScrubPADS® is a patented dry‑and‑wet coated abrasive, specifically engineered to remove residues, rust, and byproducts from process equipment in semiconductor wafer fabs. ScrubPADS® is widely used in 200‑mm and 300‑mm fabs for preventive maintenance (PM) or on wet‑chemical vapor deposition, plasma‑enhanced chemical vapor deposition, dry etch, physical vapor deposition, and ion implantation tools. With extremely low levels of metals and mobile ions, ScrubPADS® offers a range of abrasives—including diamond, silicon carbide, and aluminum oxide—to deliver safe, efficient wet cleaning that meets Best Known Methods (BKMs). When paired with UltraSOLV® sponges, lint‑free cloths, and swabs, ScrubPADS® helps shorten cleaning times, minimize equipment downtime, and reduce contamination levels on critical process tools.
Key Features
• With a range of grit sizes, it can swiftly remove process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear.
• ScrubPADs’ fiber-free structure significantly reduces the level of contaminants in cleaning tools.
• A unique adhesion technology reduces the shedding of abrasive particles, resulting in a cleaner PM process.
• Use UltraSOLV® sponges together for cleaning and to extend their service life.
• Minimize harmful ionic residues by using abrasives.
• It allows H2O2 to be eliminated in the PM, thereby significantly reducing downtime.
Product Specifications
| Brand | Foamtec |
| Name | 140 Diamond Grit ScrubPAD® |
| Model number | HT4514D-10 |
| Size | 3" x 4" |
| Color | Yellow |
| Packaging | 10 pcs/bag |
| Validity period | 3 years |
| Place of origin | Thailand |
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