No. 800 square diamond polishing cloth
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No. 800 square diamond polishing cloth
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Product Description
Product Overview
ScrubPADS® is a patented wet‑dry coated abrasive, specifically engineered to remove residues, rust, and byproducts from process equipment in semiconductor fabs. ScrubPADS® is widely used in 200mm and 300mm fabs for PM or wet‑process CVD, PECVD, dry etch, PVD, and ion implantation tools. With extremely low levels of metallic and mobile ions, ScrubPADS® offers a range of diamond, silicon carbide, and aluminum oxide abrasives to deliver safe, efficient wet cleaning of BKMs. When used in conjunction with UltraSOLV® sponges, lint‑free cloths, and swabs, ScrubPADS® helps reduce cleaning times, equipment downtime, and contamination levels on critical process tools.
Key Features
• With a range of grit sizes, it can swiftly remove process residues from aluminum, stainless steel, ceramic, quartz, and anodized surfaces while minimizing tool wear.
• ScrubPADs’ fiber-free structure significantly reduces the level of contaminants in cleaning tools.
• A unique adhesion technology reduces the shedding of abrasive particles, resulting in a cleaner PM process.
• Use it together with UltraSOLV® sponge for cleaning and to extend its service life.
• By using washing abrasives, harmful ionic residues are minimized.
• It allows H2O2 to be eliminated in the PM, thereby significantly reducing downtime.
Product Specifications
| Brand | Foamtec |
| Name | 800 Diamond Grit ScrubPAD® |
| Model number | HT4580D-10 |
| Size | 3" x 4" |
| Color | Yellow |
| Packaging | 10 pcs/bag |
| Validity period | 3 years |
| Place of origin | Thailand |
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